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Items for Subject "atomic layer deposition"

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Showing 2 items.

Issue Date	Title	Author(s)
Aug-2006	ALD and Characterization of Aluminum Oxide Deposited on Si(100) Using Tris(diethylamino) Aluminum and Water Vapor	Katamreddy, Rajesh; Inman, Ronald; Jursich, Gregory; Soulet, Axel; Takoudis, Christos
Jun-2007	Cyclic Chemical-Vapor-Deposited TiO2/Al2O3 Film Using Trimethyl Aluminum, Tetrakis(diethylamino)titanium, and O2	Song, Xuemei; Takoudis, Christos G