uic building

uic pavilion

uic student center

Advanced Search

Search INDIGO This Collection

INDIGO Home
Engineering, College of
Chemical Engineering, Department of
Publications - Chemical Engineering
Browse Publications - Chemical Engineering by Subject

Browse Publications - Chemical Engineering by Subject "ellipsometry"

Previous Page

Now showing items 1-1 of 1

Selective atomic layer deposition of HfO2 on copper patterned silicon substrates

Tao, Qian; Jursich, Gregory; Takoudis, Christos (American Institute of Physics, 2010)

PDF (272KB)

Previous Page

Now showing items 1-1 of 1

Browse

INDIGO
- Titles
- Authors
- Subjects
- Date
- Communities
This Collection
- Titles
- Authors
- Subjects
- Date

My Account

Information

Access Key